オプティカルナノゲージ

Optical Nano Gauge

This page will explain about Taylor Hobson’s “Optical Nano Gauge” used in TDC.

What is Optical Nano Gauge

Optical nano gauge is a film thickness meter provided by Hamamatsu Photonics Co., Ltd., and its official name is “Optical Nano Gauge C13027-11”.

The C13027 is a non-contact film thickness measuring device that uses spectroscopic interferometry, and is compatible with the thinnest 10 nm ultra-thin film measurement in the history of the series. Since high-speed measurement of up to 200Hz is possible, it can also be used for measurement on high-speed lines.

Features of Optical Nano Gauge C13027

● Supports sequencer connection
● Reduced tact time (fastest 200 Hz)
● Supports 10 nm thin film measurement
● Simultaneous measurement of film thickness and color is possible
● Miniaturization (30% reduction in installation area: compared to C12562)
● Wide wavelength support (400 nm to 1100 nm)
● Equipped with simple measurement in software
● Double-sided analysis is possible
● Resistant to height fluctuations
● Optical constant (n, k) analysis
● Supports mapping

Quote source:Optical NanoGauge Thickness measurement system

Specifications of Optical Nano Gauge C13027

Model name C13027-11
Measurement film thickness range (glass) 10 nm~100 um ※1
Measurement reproducibility (glass) 0.02 nm ※2 ※3
Measurement accuracy (glass) +/- 0.4 % ※3 ※4
Light source  Halogen light source
Measurement wavelength range 400 nm~1100 nm
Spot size about dia.1 mm ※3
Working distance 10 mm ※3
Measurable layer max 10 layers
Number analysis FFT analysis, fitting analysis, optical constant analysis, color analysis
Number analysis measurement time 3 ms/point ※5
Light guide connector shape FC
External communication function RS-232C、Ethernet
Power supply AC100 V~AC240 V、50 Hz/60 Hz
Power consumption 約about 80 VA
  • Output Signal:
    • Analog output 0 V to 10 V / high impedance 1 channel
    • Alarm output TTL / high impedance 1 channel
    • Learning output TTL / high impedance 1 channel
  • Input Signal:
    • Measurement start signal TTL / high impedance 1 channel

※1 When the refractive index of glass is converted to 1.5
※2 Standard deviation when measuring 400 nm thick glass film
※3 Depends on the magnification of the optical system or objective lens used
※4 VLSI Standards Measurement Guarantee Scope stated in the measurement guarantee.
※5 Shortest exposure time

引用元: Optical NanoGauge Thickness measurement system

Hamamatsu Photonics Co., Ltd.

Hamamatsu Photonics researches and develops optical sensors, various light sources (lamps), optical semiconductor devices, life sciences, semiconductor devices, laser technology, etc., based on the philosophy of “developing technologies that make full use of light and making them useful for society.” It is a company whose main business is manufacturing and sales.

In particular, we are focusing on a wide range of research related to light, from basic research on light to applied research pursuing its potential, and three bases have been established: the Central Research Institute, the Tsukuba Research Center, and the Industrial Development Research Center.

Optical Nano Gauge used in TDC

TDC uses the following optical nano gauge models.

・Optical Nano Gauge C13027
Spectral interferometry non-contact film thickness measuring machine

It is used to control the high-precision film thickness. By wrapping it little by little, the processor himself measures it, and by repeating this process, a uniform film thickness is achieved within the same surface.

For other measuring instruments handled by TDC, please refer to the “Measuring Instruments” page.