What is microfabrication? | Explanation of basic knowledge and processing methods

This page provides basic knowledge and processing methods regarding microfabrication technology.

For more information on TDC’s precision polishing services, please also see the “Precision lapping service / ultra precision lapping service” page.

What is microfabrication?

Fine processing refers to performing minute processing on materials such as metals and resins.

There are no specific standards for what is called micromachining, but generally speaking, machining in microns (1/1000mm) is called “micromachining.”

Micro-machining involves processing so fine that it cannot be seen with the naked eye, so experienced engineers are required to process it correctly.In order to improve the precision of processing, the temperature and humidity of factories and machines must be controlled, and vibrations must be controlled. We must take measures to create an environment suitable for microfabrication.

As a name similar to micro-machining, processing performed with strict precision and tolerances is sometimes called “precision machining,” but the way it is expressed differs from company to company, with micro-machining and precision machining sometimes being used interchangeably. Masu.

Microfabrication by processing method

Microfabrication is achieved using various processing methods.

Typical microfabrication methods are as follows.

Micromachining by cutting

When micromachining is performed by cutting or grinding, a processing machine that can precisely rotate and feed the tool is used. Additionally, it is common to use specialized tools that are durable and have sharp cutting edges.

During machining, burrs and chips generated can have a negative impact on machining, and thin and soft workpieces can also be deformed, so a wide range of know-how is required, including knowledge of how to use processing machines and workpieces. You can

If you would like to know the basic knowledge of cutting processing and the cutting accuracy of TDC, please see the page “What is cutting” page.

Fine processing by machining

A machining center is one of the processing machines often used in micromachining.
A major feature of machining centers is that they are equipped with an “ATC (automatic tool changer)”. ATC is a function that allows you to automatically exchange multiple tools stored in a device, and processes such as milling, drilling, and tapping, which were originally impossible to perform without using multiple devices, can be performed according to input programming. It can be done in bulk.

Microprocessing using laser

Laser processing uses laser beams such as near-ultraviolet lasers, far-ultraviolet lasers, and ultrashort pulsed lasers. Laser processing can perform detailed processing by pinpoint laser irradiation, and is characterized by a high degree of freedom in processing depending on the purpose, such as creating curves and drilling holes.

In particular, ultrashort pulsed lasers, which can process at low temperatures, cause less damage due to heat and can perform fine processing even on difficult-to-process materials such as glass.

Micromachining using electrical discharge machine

For workpieces that are prone to distortion during cutting or grinding, die-sinking electrical discharge machining or wire electrical discharge machining is used, which processes the workpiece while melting it using electric discharge.

Electrical discharge machining is a mechanism in which electrical discharge is generated between an electrode and a workpiece, and the resulting heat is used to process the workpiece, so even hard materials can be machined as long as they are conductive.

In general, it is difficult to achieve high precision on the machined surface with electrical discharge machining, so finishing treatments such as polishing may be required.

Products manufactured using microfabrication technology

Microfabrication technology is used for the following parts and products.

• semiconductor

Smartphones, flat-screen TVs, computers, cars, music players, digital cameras

• lcd display

Smartphones, flat-screen TV, computers

• MEMS

Smartphones, flat-screen TVs, computers, cars, music players, digital cameras

Points required for microfabrication

Micromachining involves extremely detailed work, so measures are required to maintain accuracy.

High precision processing machine

Highly accurate processing machines are extremely important in micromachining.

Micro holes and micro grooves require machining in microns, so a machining center that can achieve high precision is required.

Perform processing and measurement under a constant temperature environment

Resins and metals have the characteristic of expanding and contracting due to changes in temperature.

In order to avoid the effects of temperature changes, it is necessary to manage cutting conditions, coolant, and prepare a constant temperature room.

Machine vibration countermeasures

Microscopic vibrations from the surrounding area are the enemy of high-precision machining.

When installing a micro-processing machine, take measures against vibration, such as digging the floor and building a foundation to reduce the effects of vibrations generated by other processing machines, and installing a vibration-proof table. That is important.

Use highly accurate measuring equipment

For micromachining, which requires dimensional accuracy and extremely small processing, measuring instruments such as calipers and micrometers cannot be used, so equipment such as high-performance CNC image measuring instruments is required.

Material selection and management

In microfabrication, it is important to understand the characteristics of materials, and to select and manage materials that suit the application.

For example, materials such as resins that undergo dimensional changes due to moisture absorption require measures such as storing them in a moisture-proof warehouse until they are processed.

Microprocessing machines owned by TDC

TDC owns the following microprocessing machines.

• Single side mirror lapping & polishing system

… Used for high-precision machining, flatness, parallelism, etc.

• double sided lapping & polishing system

…Used as a GC lapping

• CMP machine​

… This is a dedicated CMP polishing device.

• Surface grinder​

… Used for thickness polishing and accuracy

• Long metal foil mirror finishing machine​

… This is a device that polishes long foils of 1 meter or more.

• ​High precision roll polishing machine

… This is a device that finishes the inner and outer diameters of rolls and shafts to a mirror finish.

For details on TDC’s processing equipment, please check the “Processing Equipment” page.

Please use TDC’s polishing technology for micromachining.

At TDC, we maintain the world’s highest level of polishing technology in the fields of ultra-precision lapping and ultra-precision polishing through our unique technological development and accumulation of know-how.

This polishing technology is widely used in the polishing process to achieve flatness and smoothness of the base material for microfabrication.

Please use TDC’s polishing technology for microfabrication that requires mirror finishing or flatness.

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