{"id":11277,"date":"2024-10-28T13:07:30","date_gmt":"2024-10-28T04:07:30","guid":{"rendered":"https:\/\/mirror-polish.com\/service\/cleaning\/"},"modified":"2025-10-27T11:26:35","modified_gmt":"2025-10-27T02:26:35","slug":"cleaning","status":"publish","type":"page","link":"https:\/\/mirror-polish.com\/en\/service\/cleaning\/","title":{"rendered":"Precision Cleaning Service"},"content":{"rendered":"\n<p>This page provides basic knowledge about precision cleaning performed at TDC. For information on TDC&#8217;s processing facilities, please also refer to  &#8220;<a href=\"https:\/\/tdc.interlink.tokyo\/en\/facility\/processing\/\">Processing Equipment<\/a>&#8221; and for more information on wafer cleaning, please refer to  &#8220;<a href=\"https:\/\/tdc.interlink.tokyo\/service\/wafer-cleaning\/\">Wafer Cleaning Equipment<\/a>&#8220;.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"\u7cbe\u5bc6\u6d17\u6d44\u3068\u306f\">What is Precision Cleaning?<\/h2>\n\n\n\n<p>Precision cleaning refers to the process of removing adhesive substances from the surfaces of parts, products, semiconductors, etc., and finishing cleaning with ultrapure water and ultrasonic waves. This cleaning also removes invisible dirt and residue, and removes particulates and ionic matter to levels that are not problematic. For example, in semiconductor manufacturing, vaporized materials and reaction products adhere to and accumulate in the manufacturing process. Precision cleaning is an indispensable process, because a certain amount of adhering matter or deposits can cause product defects or production problems.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Features of precision cleaning<\/h3>\n\n\n\n<p>Precision cleaning has the following features:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>No unwanted substances such as chemicals remain.<\/li>\n\n\n\n<li>Even complex shapes can be cleaned<\/li>\n\n\n\n<li>No secondary waste generated<\/li>\n\n\n\n<li>Virtually no morphological or dimensional changes on the base material surface<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Precision cleaning applications<\/h3>\n\n\n\n<p>Precision cleaning is mainly used for the following purposes.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Cleaning of parts for semiconductor, liquid crystal, and organic EL manufacturing equipment<\/li>\n\n\n\n<li>Cleaning of HDD parts, semiconductors, liquid crystal manufacturing equipment parts, etc.<\/li>\n\n\n\n<li>Cleaning electronics that cannot be cleaned with water or chemicals<\/li>\n\n\n\n<li>Complex mold cleaning<\/li>\n\n\n\n<li>Cleaning of parts that require cleanliness such as medical equipment<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"tdc\u306b\u3066\u5b9f\u65bd\u3057\u3066\u3044\u308b\u7cbe\u5bc6\u6d17\u6d44\">TDC&#8217;s Precision cleaning Service<\/h2>\n\n\n\n<p>In April 2021, TDC set up precision cleaning equipment, enabling us to handle from precision polishing to precision cleaning in house. Please feel free to contact us.<\/p>\n\n\n\t\t<div class=\"block-contact en\">\n\t\t\t<p class=\"cta_catch\">Empower your projects with<br class=\"sp_br\"> nano-scale precision polishing.<\/p>\n\t\t\t<div class=\"inner_wrap\">\n\t\t\t\t<div class=\"inner\">\n\t\t\t\t\t<div class=\"block-contact__tel\">\n\t\t\t\t\t\t<p class=\"title\">\u2015 we\u2019ve got you covered \u2015 <\/p>\n\t\t\t\t\t\t<p class=\"text\">Material procurement \/ Test pieces<br>Any materials & shapes \/ Hard-to-cut materials<br>Single to mass production <\/p>\n\t\t\t\t\t<\/div>\n\n\t\t\t\t\t<div class=\"cta_btnWrap\">\n\t\t\t\t\t\t<ul class=\"block-contact__contact\">\n\t\t\t\t\t\t\t<li>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/mirror-polish.com\/en\/contact\/\"><span>Free Consultation \/ Quote<\/span><\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<ul class=\"faqList\">\n\t\t\t\t\t\t\t<li><a href=\"https:\/\/mirror-polish.com\/en\/faq\/how-to-order\/\">\u203a How to Order <\/a><\/li>\n\t\t\t\t\t\t\t<li><a href=\"https:\/\/mirror-polish.com\/en\/faq\/qa\/\">\u203a Q & A <\/a><\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\t\t<\/div>\n\n\n\n\n<h2 class=\"wp-block-heading\">Materials to be cleaned<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Single wafer cleaning type<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Compatible size:<br>2\uff5e8 inches (single side)<\/li>\n\n\n\n<li>Achievement:<br>4-inch LT\/LN\/Si\/crystal wafer, 2-inch GaN\/Si\/sapphire wafer<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Batch type<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Compatible size:<br>\uff5e6 inches<\/li>\n\n\n\n<li>Achievement:<br>4 inch transparent ceramic substrate, 10mm squre sapphire substrate, 4mm squre diamond substrate, SUS304 parts<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"tdc\u306e\u7cbe\u5bc6\u6d17\u6d44\u306e\u30d5\u30ed\u30fc\">Flow of TDC&#8217;s precision cleaning<\/h2>\n\n\n\n<p>We have two types of wafer cleaning equipment: a &#8220;single wafer cleaning type&#8221; that cleans one wafer at a time and a &#8220;batch type&#8221; that cleans several wafers at once. Although it may vary depending on the material and shape, the basic cleaning process for each is as follows.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\" id=\"\u679a\u8449\u5f0f\u6d17\u6d44\u5f0f\"><strong><strong>Single wafer cleaning<\/strong><\/strong><\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li>wafer setting<\/li>\n\n\n\n<li>ultrasonic spot shower<\/li>\n\n\n\n<li>scrub cleaning<\/li>\n\n\n\n<li>ultrasonic spot shower<\/li>\n\n\n\n<li>spin drying<\/li>\n\n\n\n<li>case packaging<\/li>\n\n\n\n<li>degassing<\/li>\n<\/ol>\n\n\n\n<p> The following flow is the basic cleaning process for single wafer cleaning.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"\u2460\u30a6\u30a7\u30cf\u30bb\u30c3\u30c8-\u2461\u8d85\u97f3\u6ce2\u30b9\u30dd\u30c3\u30c8\u30b7\u30e3\u30ef\u30fc\">1. Wafer setting \/ 2. Ultrasonic spot shower<\/h4>\n\n\n\n<p>The water coming out of the white circle in the photo is called spot cleaning, and this is an ultrasonic transducer, and the water passing through it becomes ultrasonic water that removes dirt, including where the water hits and flows.<\/p>\n\n\n\n&nbsp;\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"575\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2021\/10\/DSC00950-1-1024x575.jpg\" alt=\"\" class=\"wp-image-4768\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00950-1-1024x575.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00950-1-300x169.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00950-1-768x432.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00950-1-1536x863.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00950-1-2048x1151.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"575\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2021\/10\/DSC00955-1024x575.jpg\" alt=\"\" class=\"wp-image-4770\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00955-1024x575.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00955-300x169.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00955-768x432.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00955-1536x863.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00955-2048x1151.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"\u2462\u30b9\u30af\u30e9\u30d6\u6d17\u6d44\">3. Scrub cleaning<\/h4>\n\n\n\n<p>After ultrasonic cleaning, scrubbing is performed with brush rollers. This roller acts like a rinse, lifting dirt with ultrasonic waves and then completely removing it with scrubbing.<\/p>\n\n\n\n&nbsp;\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"575\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2021\/10\/DSC00951-1-1024x575.jpg\" alt=\"\" class=\"wp-image-4781\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00951-1-1024x575.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00951-1-300x169.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00951-1-768x432.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00951-1-1536x863.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/10\/DSC00951-1-2048x1151.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"\u2463\u8d85\u97f3\u6ce2\u30b9\u30dd\u30c3\u30c8\u30b7\u30e3\u30ef\u30fc\">4. Ultrasonic spot shower<\/h4>\n\n\n\n<p> Ultrasonic cleaning is performed once again as a finishing touch.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"\u2464\u30b9\u30d4\u30f3\u4e7e\u71e5\">5. Spin drying<\/h4>\n\n\n\n<p>The table is rotated at high speed to dry.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"\u2465\u691c\u67fb\">6. Inspection<\/h4>\n\n\n\n<h4 class=\"wp-block-heading\" id=\"\u2466\u5c02\u7528\u30b1\u30fc\u30b9\u306b\u68b1\u5305\u306e\u5f8c-\u8131\u6c17\u5305\u88c5\">7. Deaerated and Packing<\/h4>\n\n\n\n&nbsp;\n\n\n\n<h3 class=\"wp-block-heading\" id=\"\u30d0\u30c3\u30c1\u5f0f\"><strong>Batch cleaning<\/strong><\/h3>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"684\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2022\/01\/DSC01236-1-1024x684.jpg\" alt=\"batch cleaning\" class=\"wp-image-5706\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-1024x684.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-300x200.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-768x513.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-1536x1027.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1.jpg 1616w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<p>There are work sinks inside the equipment, starting from the left side viewed from the front of the equipment, and a total of five cleaning tanks: a storage tank, a chemical tank, a QDR tank, an OF tank, and a hot water tank. This equipment have a heater and ultrasonic generator 38 kHz\/600 W in the chemical tank, an ultrasonic generator 160 kHz\/600 W in the OF tank, and a heater in the hot water tank. Currently, the basic wafer cleaning operation in batch mode is performed in the following flow.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">1. Hand scrub cleaning<\/h4>\n\n\n\n<p>Use a PVA sponge at the sink to perform hand scrubbing.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff11-1024x768.jpg\" alt=\"\u7cbe\u5bc6\u6d17\u6d44(\u30d0\u30c3\u30c1\u5f0f\uff09\u306e\u624b\u9806\u2460\u30cf\u30f3\u30c9\u30b9\u30af\u30e9\u30d6\u6d17\u6d44\" class=\"wp-image-7161\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff11-1024x768.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff11-300x225.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff11-768x576.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff11-1536x1152.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff11-2048x1536.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading\">2. Storage in liquid<\/h4>\n\n\n\n<p>After hand scrubbing, it is stored in liquid (pure water) in a storage tank so that it does not dry out.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff12-2-1024x768.jpg\" alt=\"\u7cbe\u5bc6\u6d17\u6d44(\u30d0\u30c3\u30c1\u5f0f\uff09\u306e\u624b\u9806\u2461\u6db2\u4e2d\u4fdd\u7ba1\" class=\"wp-image-7167\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff12-2-1024x768.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff12-2-300x225.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff12-2-768x576.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff12-2-1536x1152.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff12-2-2048x1536.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h4 class=\"wp-block-heading\">3. Chemical cleaning<\/h4>\n\n\n\n<p>It is transferred from the storage tank to the chemical liquid tank, and the chemical liquid cleaning is performed by chemical liquid + heating + ultrasonic waves.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">4. QDR<\/h4>\n\n\n\n<p>After chemical cleaning, QDR (Quick Dump Rins.) is performed, in which the tank is filled with pure water at once, and the tank is quickly drained and rinsed.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">5. OF water rinse<\/h4>\n\n\n\n<p>After QDR, OF water washing is performed by continuously flowing pure water into the tank at the same time as ultrasonic cleaning and rinsing while overflowing.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\">6. DRY<\/h4>\n\n\n\n<p>Finally, it is put into a hot water tank, and the stage is pulled up at a speed of 0.5 to 1 mm\/sec to dry it out.<\/p>\n\n\n\n<p>Wafers are placed in carriers and cleaned in each tank.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff16-1024x768.jpg\" alt=\"\u7cbe\u5bc6\u6d17\u6d44(\u30d0\u30c3\u30c1\u5f0f\uff09\u306e\u624b\u9806\u2465\u4e7e\u71e5\" class=\"wp-image-7171\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff16-1024x768.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff16-300x225.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff16-768x576.jpg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff16-1536x1152.jpg 1536w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/07\/\u5de5\u7a0b\uff16-2048x1536.jpg 2048w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\" id=\"tdc\u306e\u30af\u30ea\u30fc\u30f3\u74b0\u5883-\u6d17\u6d44\u8a2d\u5099\">TDC&#8217;s<strong>&nbsp;Cleaning Equipment<\/strong><\/h2>\n\n\n\n<p>TDC has the following wafer cleaning equipment in house.<\/p>\n\n\n<table style=\"border-collapse: collapse; width: 101.501%; height: 223px;\">\n<tbody>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 19px; text-align: center; vertical-align: middle;\">HOZAN<\/td>\n<td style=\"width: 33.4102%; height: 19px; text-align: center; vertical-align: middle;\">Clean Booth<\/td>\n<td style=\"width: 35.7949%; height: 19px; text-align: center;\">10m\u00d75m ISO Class\uff13<br \/>\uff08Particular Size 0.1\u03bcm\uff09<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center; vertical-align: middle;\">HOZAN<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center; vertical-align: middle;\">Clean Booth<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center;\">6m\u00d73m ISO Class\uff13<br \/>\uff08Particular Size 0.1\u03bcm\uff09<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center;\">ORGANO<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center;\">Ultra-pure water System<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center;\">UC\u20132600<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center;\">HORIBA<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center;\">Water Quality Analyzer<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center;\">LAQUA\u3000WQ330<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center;\">Temtec<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center;\">Wafer Cleaning System<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center;\">1<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center;\">In-house<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center;\">Wafer Cleaning System<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center;\">1<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center; vertical-align: middle;\">ELGA<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center;\">Ultra-pure water System<br \/>Purelab Chorus<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center; vertical-align: middle;\">60L\u3000<\/td>\n<\/tr>\n<tr style=\"height: 23px;\">\n<td style=\"width: 30.7948%; height: 23px; text-align: center;\">KOKEN<\/td>\n<td style=\"width: 33.4102%; height: 23px; text-align: center;\">Clean Bench ISO Class1<\/td>\n<td style=\"width: 35.7949%; height: 23px; text-align: center;\">Table Koach<\/td>\n<\/tr>\n<tr style=\"height: 43px;\">\n<td style=\"width: 30.7948%; text-align: center; height: 43px;\">Japan airtech<\/td>\n<td style=\"width: 33.4102%; text-align: center; height: 43px;\">Clean Booth<\/td>\n<td style=\"width: 35.7949%; text-align: center; height: 43px;\">6m\u00d73.5m\u3000ISO Class 3<br \/>\uff08Particular Size 0.1\u03bcm\uff09<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2021\/04\/tdc1-1024x768.jpeg\" alt=\"\u30aa\u30eb\u30ac\u30ce\u3000\u8d85\u7d14\u6c34\u88fd\u9020\u88c5\u7f6e\" class=\"wp-image-2863\" width=\"636\" height=\"477\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc1-1024x768.jpeg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc1-300x225.jpeg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc1-768x576.jpeg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc1.jpeg 1440w\" sizes=\"auto, (max-width: 636px) 100vw, 636px\" \/><figcaption class=\"wp-element-caption\">ORGANO Ultrapure Water System<\/figcaption><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2021\/04\/tdc3-1024x768.jpeg\" alt=\"\u30af\u30ea\u30fc\u30f3\u30d6\u30fc\u30b9\" class=\"wp-image-2867\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc3-1024x768.jpeg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc3-300x225.jpeg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc3-768x576.jpeg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc3.jpeg 1440w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><figcaption class=\"wp-element-caption\">Clean Booth<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2021\/04\/tdc2-1024x768.jpeg\" alt=\"\u30af\u30ea\u30fc\u30f3\u30d6\u30fc\u30b9\" class=\"wp-image-2865\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc2-1024x768.jpeg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc2-300x225.jpeg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc2-768x576.jpeg 768w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2021\/04\/tdc2.jpeg 1061w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><figcaption class=\"wp-element-caption\">Wafer Cleaner -Single Wafer Cleaning-<\/figcaption><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1438\" height=\"1080\" src=\"https:\/\/tdc.interlink.tokyo\/wp-content\/uploads\/2022\/01\/DSC01236-1-edited.jpg\" alt=\"\u30a6\u30a8\u30cf\u7cbe\u5bc6\u6d17\u6d44\u88c5\u7f6e \u679a\u8449\u5f0f\" class=\"wp-image-5735\" srcset=\"https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-edited.jpg 1438w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-edited-300x225.jpg 300w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-edited-1024x769.jpg 1024w, https:\/\/mirror-polish.com\/__zJQPsRvjBTbe\/wp-content\/uploads\/2022\/01\/DSC01236-1-edited-768x577.jpg 768w\" sizes=\"auto, (max-width: 1438px) 100vw, 1438px\" \/><figcaption class=\"wp-element-caption\">Wafer Cleaner -Batch Cleaning-<\/figcaption><\/figure>\n<\/div>\n<\/div>\n\n\n\t\t<div class=\"block-contact en\">\n\t\t\t<p class=\"cta_catch\">Empower your projects with<br class=\"sp_br\"> nano-scale precision polishing.<\/p>\n\t\t\t<div class=\"inner_wrap\">\n\t\t\t\t<div class=\"inner\">\n\t\t\t\t\t<div class=\"block-contact__tel\">\n\t\t\t\t\t\t<p class=\"title\">\u2015 we\u2019ve got you covered \u2015 <\/p>\n\t\t\t\t\t\t<p class=\"text\">Material procurement \/ Test pieces<br>Any materials & shapes \/ Hard-to-cut materials<br>Single to mass production <\/p>\n\t\t\t\t\t<\/div>\n\n\t\t\t\t\t<div class=\"cta_btnWrap\">\n\t\t\t\t\t\t<ul class=\"block-contact__contact\">\n\t\t\t\t\t\t\t<li>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/mirror-polish.com\/en\/contact\/\"><span>Free Consultation \/ Quote<\/span><\/a>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<ul class=\"faqList\">\n\t\t\t\t\t\t\t<li><a href=\"https:\/\/mirror-polish.com\/en\/faq\/how-to-order\/\">\u203a How to Order <\/a><\/li>\n\t\t\t\t\t\t\t<li><a href=\"https:\/\/mirror-polish.com\/en\/faq\/qa\/\">\u203a Q & A <\/a><\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t<\/div>\n\t\t<\/div>\n\n\n\n\n<p><\/p>\n\n\n\n<p><\/p>\n","protected":false},"excerpt":{"rendered":"<p>This page provides basic knowledge about precision cleaning performed at TDC. For information on TDC&#8217;s processing facilities, please also refer to &#8220;Processing Equipment&#8221; and for more information on wafer cleaning, please refer to &#8220;Wafer Cleaning Equipment&#8220;. What is Precision Cleaning? Precision cleaning refers to the process of removing adhesive substances from the surfaces of parts, [&hellip;]<\/p>\n","protected":false},"author":10,"featured_media":4716,"parent":1171,"menu_order":4,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-11277","page","type-page","status-publish","has-post-thumbnail","hentry"],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/pages\/11277","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/users\/10"}],"replies":[{"embeddable":true,"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/comments?post=11277"}],"version-history":[{"count":11,"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/pages\/11277\/revisions"}],"predecessor-version":[{"id":13328,"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/pages\/11277\/revisions\/13328"}],"up":[{"embeddable":true,"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/pages\/1171"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/media\/4716"}],"wp:attachment":[{"href":"https:\/\/mirror-polish.com\/en\/wp-json\/wp\/v2\/media?parent=11277"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}