Microfabrication technology

This page describes microfabrication technology.

For more information on TDC’s precision polishing services, please also see the “Precision lapping service / ultra precision lapping services” page.

What is microfabrication?

Microfabrication is the name given to technology that performs micron-scale processing on objects such as metals and resins using machining centers, laser processing machines, electrical discharge machines, etc.

A similar word is “precision machining”, but there is no clear standard for difference in accuracy.

In general, areas of less than 100 μm are often referred to as microfabrication, and processing is performed at a finer level than precision processing. In addition, equipment that can perform microfabrication is called a “microfabrication machine”, and it is limited to some machines among machining centers.

Microfabrication can be further subdivided into:

• Micro hole processing
• Fine grooving

Micro hole processing

What is micro-hole processing? Micro-hole processing is the processing of making small holes of less than 100 μm. It has a wide range of uses, and is one of the technologies required in fields such as electronic equipment, semiconductors, and medicine.

High-quality processing is performed by using high-precision microfabrication machines and taking into account external factors such as rotation speed settings and temperature.

What is micro grooving?

Micro grooving is processing that creates extremely thin grooves with a width of less than 100 μm. Like microhole processing, it is used in the fields of semiconductors, electronic components, medical equipment, etc., and is one of the essential processing technologies for microchannels, which are fine groove structures, and heat dissipation fins for fine devices. is.

Unlike general grooving, the width between fine grooves is often very small, so it is important to take measures from the design stage to ensure strength and perpendicularity.

What is the difference from ultra-fine processing?

Processing at the nanoscale level, which is even finer than micron-scale microfabrication, is sometimes called ultra-fine processing.

However, there is no clear definition, and in most cases the difference differs depending on the company.

Microfabrication by processing method

Microfabrication is achieved by using various processing methods.

Typical microfabrication methods are as follows.

Microfabrication by cutting

When fine processing is performed by cutting or grinding, a processing machine that can precisely rotate and feed the tool is used. In addition, it is common to use special tools that are durable and have sharp cutting edges.

Three-dimensional shapes can be created by cutting and grinding, but care must be taken in the case of thin and soft objects that are easily deformed.

Microfabrication by machining

One of the major features of the machining center is that it is equipped with an “ATC (Automatic Tool Changer)”. ATC is a function that can automatically exchange multiple tools stored in the equipment, and it is possible to program milling, drilling, and tapping with a single machining center, which normally could not be performed without using multiple equipment. It is possible to do it once in the street.

Machining centers are widely used among machine tools for microfabrication, and finishing is performed using microfabrication tools as small as 0.01 mm in diameter.

Microfabrication by laser

Laser processing is one of the processing methods widely used for microfabrication because it can focus laser beams such as near-ultraviolet lasers, far-ultraviolet lasers, and ultrashort pulse lasers to a small area.

Microfabrication such as free-curve cutting and drilling is possible. Ultrashort-wave pulse lasers, in particular, are processed at low temperatures, so there is little damage due to heat.

Microfabrication by electric discharge machine

Die-sinking electric discharge machining and wire electric discharge machining are used for materials that are prone to distortion during machining and grinding.

Since electric discharge machining is a mechanism for machining objects using heat generated by arc discharge, it is possible to machine even hard materials such as cemented carbide.

Since the machined surface tends to be rough due to electrical discharge marks, it is necessary to polish and finish.

Products manufactured using microfabrication technology

Microfabrication technology is used in the following parts and products.

• Semiconductor
  Smartphones, flat-panel TVs, personal computers, automobiles, music players, digital cameras
• Liquid crystal display
  smartphones, flat-screen TVs, computers
• MEMS
  Smartphones, flat-panel TVs, personal computers, automobiles, music players, digital cameras

Points required for microfabrication

In microfabrication, extremely fine cutting work is performed, so measures to maintain accuracy are required.

High-precision processing machine

High-precision processing machines are extremely important in microfabrication.

For fine holes and fine grooves, processing of 100 μm or less is required, so high-precision processing cannot be performed with general machining centers.

Perform processing and measurement under a constant temperature environment

Resins and metals have the characteristic of shrinking due to changes in temperature.

In order to avoid the effects of temperature changes, it is necessary to manage cutting conditions and coolant, prepare a constant temperature room, etc.

Machine vibration countermeasures

Minor vibrations from the surroundings are the great enemy of high-precision machining.

It is important to take countermeasures against vibration, such as creating a foundation by digging the installation location of the microfabrication machine to a depth of about 1m.

Use precision measuring equipment

Microfabrication, which requires dimensional accuracy, requires equipment such as high-performance CNC image measuring instruments.

The quality of microfabrication is guaranteed only with such highly accurate measuring equipment.

Selection and management of materials

In microfabrication, it is important to understand the characteristics of materials and select materials that are suitable for the application.

For example, materials such as resin cause dimensional displacement due to moisture absorption.

Microfabrication machine owned by TDC

TDC has the following facilities for microfabrication.

• Single-sided mirror lapping machine
  Used for high-precision accuracy such as mirror surface processing, flatness, and parallelism​​
• Double sided wrap machine
  Used as a GC lapping machine​
• CMP apping machine​
  Dedicated equipment for CMP polishing
• Surface grinder​
  Used for thickness polishing and accuracy
• Long metal foil mirror finishing machine​
  This is a device for polishing long foils of 1 meter or more​
• ​High-precision roll grinder
  This equipment mirrors the inner and outer diameters of rolls and shafts​

Please use TDC’s polishing technology for microfabrication

At TDC, we maintain the world’s highest level of polishing processing technology in the fields of ultra-precision lapping and ultra-precision polishing through our unique technology development and accumulation of know-how.

This polishing technology is widely used in the polishing process to bring out the flatness and smoothness of the substrate for microfabrication.

Please use TDC’s polishing technology for fine processing that requires mirror surface and flatness.

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